Japanese Datasheets
  home     careers     become a partner     portal     contact  
 
 
 

RASIRC develops products that purify and deliver ultra pure liquids and gases with a primary focus on water vapor. RASIRC Products

RASIRC products include:

  • Steam purification equipment
  • High temperature humidifiers and vaporizers
  • Ultrapure dryers

RASIRC technology includes the first steam purification technology ever brought into the semiconductor market. This technology reduces cost, improves quality, and dramatically improves safety.

Our patented seal and product designs allow RASIRC to deliver state of the art technology for fluid delivery and control covering temperature, flow rate and purity.

 

 

Recent News

Article
Alternative Method for Steam Generation for Thermal Oxidation of Silicon
—Gases & Instrumentation Magazine

January 20, 2010
RASIRC Presents Poster on Thermal Oxidation of Silicon at SPIE:
Steamer replaces pyrolytic torches to improve growth rate and eliminate hydrogen

January 12, 2010
RASIRC Introduces the Steamer ‘02 for Ultrapure Process Steam: New Generation of Steamer for Precision Flow Control and Tool-to-Tool Repeatability

January 6, 2010
RASIRC Granted Trademark for RainMaker Product Line: Unique humidifier assembly and systems now protected

Nov 23, 2009
RASIRC Granted Patent on Vaporizer for Delivery of Water Vapor and Other Low Vapor Pressure Gases

Technical Paper
Passivation Quality of Wet Oxides Grown from Purified Steam

Article
Steamer vs. torch in PV manufacturing—a cost of ownership comparison

Article
Water Vapor and Carbon Nanotubes
—Vacuum Technology and Coating

Awards

Connect 2007 Finalist

MicroNano 2007

RASIRC was selected as a winner to appear in the 2006 Semicon West Technology Innovation Showcase

RASIRC won the Attendees' Choice Award at Semicon West 2006

RASIRC won the 2006  Gassy Award

RASIRC is profiled in this video, aired on Fox Connect

 
RASIRC Home