RASIRC products generate and deliver gas to fabrication processes. Each unit is a dynamic gas plant in a box—converting common liquid chemistries into safe and reliable gas flow for most processes. First to generate ultra-high purity (UHP) steam from de-ionized water, RASIRC technology can now also deliver hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations.
RASIRC products include:
- Peroxidizer® for high concentration hydrogen peroxide gas
The company was founded by Jeffrey Spiegelman, former president and founder of Aeronex, Inc., a company that designed and manufactured gas purification systems.
RASIRC holds the following patents and trademarks.
- Patent #7,618,027: This patent is
for a vaporizing device for control, delivery, and purification of water vapor in conjunction with a carrier gas. The patent is used in RainMaker humidification systems (RHS) to control the transfer and purification of water vapor directly into a carrier gas stream including inert, corrosive, and flammable gases, such as hydrogen, at a wide range of flow rates for use in solar, microelectronics, and other critical process applications. Read the press release >>
- Patent #7,625,015B2: This patent is for a novel adhesive and weld-free assembly technique for working with membranes and ultrapure materials. The patented process allows for the simultaneous sealing of multiple tubes within a single outer shell when an external radial compressive force is applied and is used in the RainMaker Humidification System (RHS).
- Patent #8,282,708: This patent is for a novel method of producing ultrapure steam. The method is based on the ability to generate a high rate of diffusion of water vapor through a non-porous membrane. The patent is used in RASIRC products for a variety of applications including wet thermal oxidation and wafer cleaning for MEMS and semiconductor devices, backside passivation for solar cells, and steam annealing for amorphous metal oxide thin film transistors (TFTs).