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About Us

RASIRC specializes in products that generate and deliver gas to fabrication processes. Each unit is a dynamic gas plant in a box—converting common liquid chemistries into safe and reliable gas flow for most processes. First to generate ultra-high purity (UHP) steam from de-ionized water, RASIRC technology can now also deliver hydrogen peroxide gas in controlled, repeatable concentrations.

RASIRC products include:

The company was founded by Jeffrey Spiegelman, former president and founder of Aeronex, Inc., a company that designed and manufactured gas purification systems.

RASIRC holds the following patents and trademarks.

  • Patent #7,618,027: This patent is for a vaporizing device for control, delivery, and purification of water vapor in conjunction with a carrier gas. The patent is used in RainMaker humidification systems (RHS) to control the transfer and purification of water vapor directly into a carrier gas stream including inert, corrosive, and flammable gases, such as hydrogen, at a wide range of flow rates for use in solar, microelectronics, and other critical process applications. Read the press release >>
  • Patent #7,625,015B2: This patent is for a novel adhesive and weld-free assembly technique for working with membranes and ultrapure materials. The patented process allows for the simultaneous sealing of multiple tubes within a single outer shell when an external radial compressive force is applied and is used in both RainMaker humidification systems (RHS) and RASIRC Steamers.
  • Patent #8,282,708: This patent is for a novel method of producing ultrapure steam. The method is based on the ability to generate a high rate of diffusion of water vapor through a non-porous membrane. The patent is used in RASIRC products including RASIRC Steamers that deliver ultra-high purity steam for a variety of applications including wet thermal oxidation and wafer cleaning for MEMS and semiconductor devices, backside passivation for solar cells, and steam annealing for amorphous metal oxide thin film transistors (TFTs).
  • Trademark: RASIRC
  • Trademark: RainMaker
 


Recent News

April 14, 2016
RASIRC to Present at Surface Preparation and Cleaning (SPCC) Conference

April 7, 2016
Rocket Fuel May Propel Moore's Law
LinkedIn Post by Ed Korcynski
Senior Technical Editor
Solid State Technology

Feb 16, 2016
RASIRC Water Free Anhydrous Hydrogen Peroxide Demonstrates Five-Fold Increase in Hydroxyl Density

Oct 14, 2015
RASIRC Methods for Safe and Stable Delivery of Hydrogen Peroxide Gas and Hydrazine Gas for ALD
Company presents technical sessions and exhibits at AVS Symposium

July 9, 2015
Hydrogen Peroxide Gas for Next Generation Semiconductor Processes: RASIRC BRUTE™ Peroxide delivers water-free H2O2 to enable new ALD reactions

June 25, 2015
RASIRC Presents Test Results Showing Stable Delivery of Hydrogen Peroxide Gas With or Without Water: Company presents posters and exhibits at ALD Conference and ALE Workshop

June 17, 2015
New RASIRC Peroxidizer® Delivers High Concentration Hydrogen Peroxide Gas into Semiconductor Processes

Recent Articles

Cheating Raoult’s Law to Enable Delivery of Hydrogen Peroxide as a Stable Vapor

Nafion-based Drying Apparatuses for Humidity Removal from Sample Gas Prior to GC/MS Analysis

 

 
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