Oxidation

Recent test results delivered 20% improvement in oxide growth rate for thin films and over 5% for very thick oxides with a new technology. This new technology from RASIRC also significantly reduces costs.

Users of the RASIRC Steamer demonstrated increased growth rate and uniformity by elimination of the oxygen carrier gas. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, RASIRC Steamer ensures that even the load end of the furnace tube reaches maximum theoretical growth rate.

Download the complete test data and report now.

The RASIRC Steamer provides 5 key benefits for High-Quality Production: Throughput Increase, Cost Reduction, Contamination Control, Repeatability and Safety.

Throughput Increases: Oxide Growth Rate 20% Faster

Increases throughput by delivering high quantities of pure steam

Eliminates carrier gas, extra oxygen and extra hydrogen, so there is no interference with steam diffusion into the silicon oxide and theoretical maximum growth rate is achieved

Eliminates thermal shadow introduced when using a torch, so the entire
furnace tube can be used for thermal oxidation

Runs process recipes with multiple flow set points High and Low

Cost Reduction: <6 Month ROI

Eliminates hydrogen and oxygen costs

Delivers bottom line savings via increased throughput and process uniformity

Contamination Control: Below Detection LImits

Purification Performance Results

Equals or exceeds the purity of pyrolitic steam by providing a very clean repeatable source of water vapor from purified steam

Eliminates the torch and the particles it generates

Prevents particles from passing through with the steam by employing a nonporous membrane

Eliminates metal components and catalysts, ensuring metallic free steam

Repeatability: 100% Partial Pressure

Improves front to back uniformity by eliminating thermal shadow from the torch

Ensures furnace saturation by delivering high quantities of steam (greater than possible with a torch)

Maintains 100% partial pressure of water vapor resulting in better chamber uniformity

Purifies steam instead of DI water, yielding ultra high purity and consistency

The chart below shows uniformity over three runs in an 8-inch horizontal furnace. The chart shows a uniformity of +/- 1.4%. During the runs, the RASIRC Steamer delivered high quantities of steam (>30 slm) to saturate the chamber without excess heat.