Oxidation
Recent test results delivered 20% improvement in oxide growth rate for thin films and over 5% for very thick oxides with a new technology. This new technology from RASIRC also significantly reduces costs.
Users of the RASIRC Steamer demonstrated increased growth rate and uniformity by elimination of the oxygen carrier gas. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, RASIRC Steamer ensures that even the load end of the furnace tube reaches maximum theoretical growth rate.
Download the complete test data and report now.
The RASIRC Steamer provides 5 key benefits for High-Quality Production: Throughput Increase, Cost Reduction, Contamination Control, Repeatability and Safety.
Throughput Increases: Oxide Growth Rate 20% Faster
• Increases throughput by delivering high quantities of pure steam |
• Eliminates carrier gas, extra oxygen and extra hydrogen, so there is no
interference with steam diffusion into the silicon oxide and theoretical
maximum growth rate is achieved |
• Eliminates thermal shadow introduced when using a torch, so the entire
furnace tube can be used for thermal oxidation |
| • Runs process recipes with multiple flow set points High and Low |
Cost Reduction: <6 Month ROI
• Eliminates hydrogen and oxygen costs |
• Delivers bottom line savings via increased throughput and process
uniformity |
Contamination Control: Below Detection LImits
• Equals or exceeds the purity of pyrolitic steam by providing a very clean
repeatable source of water vapor from purified steam |
• Eliminates the torch and the particles it generates |
• Prevents particles from passing through with the steam by employing
a nonporous membrane |
• Eliminates metal components and catalysts, ensuring metallic free
steam |
Repeatability: 100% Partial Pressure
• Improves front to back uniformity by eliminating thermal shadow from
the torch |
• Ensures furnace saturation by delivering high quantities of steam
(greater than possible with a torch)
|
• Maintains 100% partial pressure of water vapor resulting in better
chamber uniformity |
• Purifies steam instead of DI water, yielding ultra high purity and
consistency |
The chart below shows uniformity over three runs in an 8-inch horizontal furnace. The chart shows a uniformity of +/- 1.4%. During the runs, the RASIRC Steamer delivered high quantities of steam (>30 slm) to saturate the chamber without excess heat.
Safety: No Explosive Gases
• Eliminates explosive hydrogen and oxygen |
• Eliminates high temperature external torch |
| • Operates at a safe temperature, significantly lower than torches |
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