UltraPure Steam for Solar Cells
Ultrapure steam is needed to form transparent conductive oxide to improve solar energy capture. Steam is being used to grow wet thermal thick oxides on the backside for state of the art current isolation when used with backside contacts. In addition steam can be used to form isolation layers between films and annealing of films to reduce defects and improve cell efficiencies.
RASIRC technology improves many processes within the solar industry:
- Passivation: eliminates hydrogen, reducing cost and improving safety.
- Interlayer Oxide Films: limits boron intrusion.
- TCO: enables high flow rates without volatizing water microdroplets, improves stability and reliability, and reduces particulates below detection limits.
- Backside Thick Oxide: reduces non-uniformity in the oxide layer.
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