Japanese Datasheets
  home     careers     become a partner     portal     contact  
 
 
 

Ultra High Purity Steam

The RASIRC Steamer uses a non-porous hydrophilic membrane that selectively allows water vapor and steam to pass through it. The chart below shows some typical results. Significant reduction can be seen in all contaminants, even with difficult contaminants such as Urea and ammonia.

Purification Performance Results (ppb)
  DI Water Source Pre-Purified Steam Purified Steam
Total Metals 19.8 0.15 0.009
Total Organic Carbon 1200 380 22
Total Silica 28 4.3 0.7
Urea 2200 48 2.6
Ammonium 1.468 1.117 0.116

Membrane selectivity is significant with water molecules passing through it 1,000,000 times faster than nitrogen molecules. In the vapor or steam phase, all other molecules are greatly restricted, so contaminants such as dissolved gases, ions, total organic carbons, particles, viruses, bacteria, pyrogens, and metals can be removed from the purified steam. Total metals have been verified to less than 10 ppt.

Data from tests done on water vapor purified using RASIRC Steamer show reduction of 67 different metals to below detectable limits. Some contaminants have been verified to less than 0.0005 parts per billion. Nitrogen and CO2 contaminants can also be virtually eliminated.

Additional Information

 

Recent News

December 18, 2008
Derrick Foster Joins RASIRC to Strengthen Diffusion Process Expertise

Article
Water Vapor and Carbon Nanotubes
—Vacuum Technology and Coating

October 13, 2008
RASIRC Announces RainMaker Humidifiers for High Temperature Humidification of Sanitary Clean Dry Air and Nitrogen

September 24, 2008
Leading Optical Wave Guide Manufacturer completes Thermal Oxide Retrofit with RASIRC Steamers

March 2008
Case Study: Low-cost, high quality alternative steam generation for silicon dioxide in thick film applications

Awards

Connect 2007 Finalist

MicroNano 2007

RASIRC was selected as a winner to appear in the 2006 Semicon West Technology Innovation Showcase

RASIRC won the Attendees' Choice Award at Semicon West 2006

RASIRC won the 2006  Gassy Award

RASIRC is profiled in this video, aired on Fox Connect

 
RASIRC Home