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Ultra High Purity Steam

The RASIRC Steamer uses a non-porous hydrophilic membrane that selectively allows water vapor and steam to pass through it. The chart below shows some typical results. Significant reduction can be seen in all contaminants, even with difficult contaminants such as Urea and ammonia.

Purification Performance Results (ppb)
  DI Water Source Pre-Purified Steam Purified Steam
Total Metals 19.8 0.15 0.009
Total Organic Carbon 1200 380 22
Total Silica 28 4.3 0.7
Urea 2200 48 2.6
Ammonium 1.468 1.117 0.116

Membrane selectivity is significant with water molecules passing through it 1,000,000 times faster than nitrogen molecules. In the vapor or steam phase, all other molecules are greatly restricted, so contaminants such as dissolved gases, ions, total organic carbons, particles, viruses, bacteria, pyrogens, and metals can be removed from the purified steam. Total metals have been verified to less than 10 ppt.

Data from tests done on water vapor purified using RASIRC Steamer show reduction of 67 different metals to below detectable limits. Some contaminants have been verified to less than 0.0005 parts per billion. Nitrogen and CO2 contaminants can also be virtually eliminated.

Additional Information

 

Additional Information

White Paper - Passivation Quality of Wet Oxides Grown from Purified Steam

White Paper - Improved Uniformity through New Steam Delivery Method

White Paper - Process Variables Affecting Silicon Oxide Films Related to Wet Thermal Oxidation

White Paper - Improved Oxide Growth Rate and Uniformity through New Steam Delivery Method

Torch Comparison

Bubbler Comparison

Case Study

Information Request

Related Materials

Steamer '02 Datasheet

Steamer 125 Datasheet

Steamer 102B50 Datasheet

RASIRC SPA Datasheet

Application Sheet - Solar

Application Sheet - Oxidation

 

 

 
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