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RASIRC specializes in products that generate and deliver gas to fabrication processes. Each unit is a dynamic gas plant in a box—converting common liquid chemistries into safe and reliable gas flow for most processes. First to generate ultra-high purity (UHP) steam from de-ionized water, RASIRC technology can now also deliver hydrogen peroxide gas in controlled, repeatable concentrations.

RASIRC products include:

RASIRC Vaporizers, RainMakers and Steamers RainMaker Humidification System Steamers RASIRC SPA RASIRC RainMaker Peroxidizer

Look for RASIRC at these events

ALD 2015 SiliconPV ALE 2015 SemiconKorea SemiconWest 2015 ALD 2015 SiliconPV ALE 2015 SemiconKorea SemiconWest 2015
 


Recent News

June 25, 2015
RASIRC Presents Test Results Showing Stable Delivery of Hydrogen Peroxide Gas With or Without Water

June 17, 2015
New RASIRC Peroxidizer™ Delivers High Concentration Hydrogen Peroxide Gas into Semiconductor Processes

Article
January/February 2015
Cheating Raoult’s Law to Enable Delivery of Hydrogen Peroxide as a Stable Vapor

Article
Nafion-based Drying Apparatuses for Humidity Removal from Sample Gas Prior to GC/MS Analysis

October 21, 2014
RASIRC Technology Successfully Used to Clean and Prepare Germanium Surfaces: High Purity Hydrogen Peroxide Vapor Delivered In-Situ

September 15, 2014
RASIRC enables liquid Hydrogen Peroxide to be used in Vapor Phase Cleaning

July 23, 2013
RASIRC Announces Dry Peroxide™ Oxidant at ALD 2013

July 8, 2013
RASIRC to Bring Dry Peroxide™ to SemiconWest/InterSolar 2013

June 27, 2013
RASIRC Presents New Hydrogen Peroxide (H2O2) Vapor Source for Pre-Treatment/Cleaning in Atomic Layer Deposition

May 30, 2013
RASIRC Presents at Sematech Surface Preparation and Cleaning Conference

May 8, 2013
RASIRC Presents Poster on Novel Hydrogen Peroxide Vapor Delivery System

October 25, 2012
RASIRC Introduces Steamer 225 for Vacuum & Atmospheric Processes

Technical Paper
Water vapor delivery to vacuum process for photovoltaic
applications

October 9, 2012
RASIRC Earns ISO 9001:2008 Certification

September 18, 2012
RASIRC Releases Results on Hydrogen Peroxide Vapor Delivery Systems for Surface Cleaning

Aug 28, 2012
MATHESON Acquires Majority Share of RASIRC

March 29, 2012
RASIRC Steamer Turbo Winner of Golden Gas Award: Ultrapure steam and blended gas system wins in Specialty Gas Delivery Systems category