RASIRC Home
 

RASIRC products purify and deliver ultra-pure liquids and gases. First to generate ultra-high purity (UHP) steam from de-ionized water, RASIRC technology now also delivers hydrogen peroxide vapor in controlled, repeatable concentrations.RASIRC Products

RASIRC products include:

RASIRC technology includes the first steam purification technology ever brought into the semiconductor market. This technology reduces cost, improves quality, and dramatically improves safety.

Our patented seal and product designs allow RASIRC to deliver state of the art technology for fluid delivery and control covering temperature, flow rate and purity.

Check out RASIRC ROI versus a Torch, Bubbler or Catalytic Sytem.

Look for RASIRC at these events

Display Week SiliconPV ALD Conference SemiconWest UCPSS
 


Recent News

Article
Nafion-based Drying Apparatuses for Humidity Removal from Sample Gas Prior to GC/MS Analysis

October 21, 2014
RASIRC Technology Successfully Used to Clean and Prepare Germanium Surfaces: High Purity Hydrogen Peroxide Vapor Delivered In-Situ

September 15, 2014
RASIRC enables liquid Hydrogen Peroxide to be used in Vapor Phase Cleaning

July 23, 2013
RASIRC Announces Dry Peroxide™ Oxidant at ALD 2013

July 8, 2013
RASIRC to Bring Dry Peroxide™ to SemiconWest/InterSolar 2013

June 27, 2013
RASIRC Presents New Hydrogen Peroxide (H2O2) Vapor Source for Pre-Treatment/Cleaning in Atomic Layer Deposition

May 30, 2013
RASIRC Presents at Sematech Surface Preparation and Cleaning Conference

May 8, 2013
RASIRC Presents Poster on Novel Hydrogen Peroxide Vapor Delivery System

October 25, 2012
RASIRC Introduces Steamer 225 for Vacuum & Atmospheric Processes

Technical Paper
Water vapor delivery to vacuum process for photovoltaic
applications

Technical Poster
Steam Delivery into Vacuum

Article
A New Approach for Improved Uniformity of Thin Thermal Oxides Using Water Vapor: A Case Study

October 9, 2012
RASIRC Earns ISO 9001:2008 Certification

September 18, 2012
RASIRC Releases Results on Hydrogen Peroxide Vapor Delivery Systems for Surface Cleaning

Aug 28, 2012
MATHESON Acquires Majority Share of RASIRC

Application Note:
Wafer Bonding

March 29, 2012
RASIRC Steamer Turbo Winner of Golden Gas Award: Ultrapure steam and blended gas system wins in Specialty Gas Delivery Systems category