Industry Need for High Purity Steam
Ultra High Purity (UHP) steam is critical to many industries
Many industries use steam as a critical process component. RASIRC products generate and deliver ultra high purity steam for these processes.
- Semiconductor Manufacturing.
RASIRC reduces costs, improves quality, and dramatically improves safety associated with diffusion, rapid thermal processing, high K layer formation, immersion lithography and other applications.
- Solar. RASIRC Steamer generate steam to form transparent conductive oxide for improved solar energy capture. Steam is also used to grow wet thermal thick oxides for current isolation when used with backside contacts, form isolation layers between films and anneal films to reduce defects and improve cell efficiencies.
- Nanotechnology. Through the addition of small amounts of water vapor, the catalyst can be kept free of molecular contamination, enabling growth of longer carbon fibers under the same general process conditions.
- MEMS. Steam is used for the growth of thick and thin oxide films on silicon wafers.
- Medical and Pharmaceutical. RASIRC generates UHP steam that is virtually free of metallic contaminants and volatile gases, unlike other processes that rely on metallic boilers and thereby load the steam with dissolved metals, silicates, and atmospheric gases.
- Power. RASIRC steam purification can reduce overall costs, improve efficiency, and increase turbine up-time by delivering ultra pure water vapor that does not require extensive chemical treatments to be clean enough for power plant use.
- Fuel Cells. RASIRC high temperature humidifiers deliver high purity water vapor, dramatically reducing contamination and potential for poisoning of the membrane catalyst and degradation of the proton exchange membrane (PEM). These humidifiers allow 100% saturation of hydrogen and air up to 120ºC operation.
- Flat Panels. Steam cleaning provides a very cost effective method for applying and removing chemistry from wafer surfaces.
- Photonics. Steam is used for generating oxide films used in managing optical signals.
- Environmental Control. Contaminated waste water can be boiled down to very low levels without concern for toxic or hazardous material release. This can reduce dangers associated with transport and storage of hazardous wastes.
RASIRC Products
RASIRC Steamers generate ultra pure steam and deliver this steam to process at a consistent flow rate of up to 50 slm. These Steamers are proven to increase oxide growth rate, chamber uniformity, film quality, and/or reduce operating cost when compared against all other steam technologies.
The RainMaker Humidification System (RHS) adds controlled amounts of pure water vapor directly into any carrier gas stream. The RHS can humidify inert, corrosive, and flammable gases, such as hydrogen and oxygen, at a wide range of flow rates. The system can deliver into atmosphere as well as vacuum process pressures.
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