Articles and Coverage
July/August 2012
Gases & Instrumentation
A New Approach for Improved Uniformity of Thin Thermal Oxides Using Water Vapor: A Case Study
April 2012
Energy Procedia
Water vapor delivery to vacuum process for photovoltaic applications
March 2012
Solid State Technology
RASIRC wet thermal oxidation cuts oxide film fab time
November/December 2011
Gases & Instrumentation
Comparison of Water Vapor to Ozone for growth of ALD Films
October 2011
ElectroIQ
Steam + gas subsystem targets film uniformity, better wafer cleaning, and PV fab steps
May 2011
PVTech
Fraunhofer ISE finds that Rasirc Steamer promotes 20.2% efficiency in back contact c-Si solar cells
June 15, 2011
BetaInsights
Fraunhofer Quantifies Steam Purity PV Benefits
February 2011
Readout
Water Vapor Delivery for Thin Film Vacuum Processes
July/August 2010
EverythingAboutEnvironment
Water Vapor Delivery for CIGSE and Other Thin Film Vacuum Processes
May 2010
Future Photovoltaics
Comparison of PV Efficiency Using Different Types of Steam for Wet Thermal Oxidation
January/February 2010
Gases & Instrumentation Magazine
Alternative Method for Steam Generation for Thermal Oxidation of Silicon
May/June 2009
Global Solar Technology
Steamer vs. torch in PV manufacturing—a cost of ownership comparison
October 2008
Vacuum Technology & Coating
Water Vapor and Carbon Nanotubes
October 2008
Semiconductor International
Steam Generator
July 2008
Semiconductor International
SemiconWest 2008 Executive Outlook
April 2008
EuroAsiaSemiconductor
Full steam ahead
March 2008
Solid State Technology
Using ultrapure steam for water-contamination control
May 2008
FabTech
New Product: RASIRC raises bar on high-purity steam generation in smaller form-factor
Jan/Feb 2008
Gases & Instrumentation
An Alternative Method and Device to Purify and Deliver Water Vapor
January 2008
Semiconductor International
Executive Outlook: Driving Productivity, CoO in 2008
October 1, 2007
Small Times
RASIRC says steam creates uniform nanotubes
October 2007
Cleanrooms
Steam delivery method improves oxide growth rate and uniformity
June 6, 2007
Small Times
Nanomanufacturing supply chain reaches beyond R&D
Solid State Technology
Controlling water vapor in gas streams
Power Engineering
Products: RASIRC Humidifier
May 29, 2007
ChipShots Blog, MicroMagazine
Catching up at NSTI with RASIRC’s Jeff Spiegelman
May 21, 2007
Semiconductor FabTech
New Product: RASIRC raises bar on high-purity steam generation in smaller form-factor
November 2006
Compound Semiconductor
Steam Generator Purifies Oxidation
PharmaManufacturing
Humidifier Allows Sterile Transfer of Water Vapor into Process Gases
August 2006
Controlled Environments
Use and generation of UHP steam has become widespread and has applications in critical processes in diverse markets
July 12, 2006
Gases and Technology Magazine
3rd Annual Gassy's Award Winners Announced at SEMICON® West: RASIRC Wins With Intaeger UHP
July 6, 2006
CleanRooms
RASIRC introduces Intaeger UHP ultra-high-purity steam generator
July 2006
Solid State Technology
SEMICON WEST PREVIEW: Expanded innovation showcase spans gamut from desktop e-beam generation to electrically measuring low-k stacks
June 17, 2006
Fox News
RASIRC is profiled as part of Fox Connect (Watch Video)
June 15, 2006
Semiconductor International
Steam Generator: SEMICON West 2006 Front-End Products
June 15, 2006
Semiconductor International
New Technologies at SEMICON West 2006: Executive Viewpoints (Jeffrey Spiegelman presents views on the roadmap)
April 2006
Micro Magazine
UHP DI-water steam has thermal, cleaning applications in chipmaking
February 2006
SPWCC
Paper
Method and Device for Purification and Delivery of Steam
Paper Presented at SPWCC.
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