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Recent News

September 15, 2014
RASIRC enables liquid Hydrogen Peroxide to be used in Vapor Phase Cleaning: Company to discuss results at Ultra Clean Processing of Semiconductor Surfaces Symposium
(PDF version)

July 23, 2013
RASIRC Announces Dry Peroxide™ Oxidant at ALD 2013: Company will present poster session and exhibit
(PDF version)

July 8, 2013
RASIRC to Bring Dry Peroxide ™ to SemiconWest/InterSolar 2013: Company will showcase new chemistries for next generation processing
(PDF version)

June 27, 2013
RASIRC Presents New Hydrogen Peroxide (H2O2) Vapor Source for Pre-Treatment/Cleaning in Atomic Layer Deposition: Shares Test Results at Advanced Semiconductor Manufacturing Conference (ASMC)
(PDF version)

May 30, 2013
RASIRC Presents at Sematech Surface Preparation and Cleaning Conference: Describes new hydrogen peroxide vaporization source
(PDF version)

May 8, 2013
RASIRC Presents Poster on Novel Hydrogen Peroxide Vapor Delivery System: Sponsors International Conference on Silicon Photovoltaics in Hamelin, Germany
(PDF version)

October 25, 2012
RASIRC Introduces Steamer 225 for Vacuum & Atmospheric Processes: Next generation of steam purification and delivery
(PDF version)

October 9, 2012
RASIRC Earns ISO 9001:2008 Certification
Scope includes sales, design and manufacture of ultra-pure-fluid delivery, purification and chemical generation systems

(PDF version)

September 18, 2012
RASIRC Releases Results on Hydrogen Peroxide Vapor Delivery Systems for Surface Cleaning
(PDF version)

Aug 28, 2012
MATHESON Acquires Majority Share of RASIRC:
RASIRC to continue developing products that purify and deliver ultra pure chemistries

(PDF version)

View all Press Releases

Recent Articles and Coverage

September 2013
Gases & Instrumentation
Nafion-based Drying Apparatuses for Humidity Removal from Sample Gas Prior to GC/MS Analysis

July/August 2012
Gases & Instrumentation

A New Approach for Improved Uniformity of Thin Thermal Oxides Using Water Vapor: A Case Study

April 2012
Energy Procedia
Water vapor delivery to vacuum process for photovoltaic applications

March 2012
Solid State Technology
RASIRC wet thermal oxidation cuts oxide film fab time

November/December 2011
Gases & Instrumentation
Comparison of Water Vapor to Ozone for growth of ALD Films

October 2011
ElectroIQ
Steam + gas subsystem targets film uniformity, better wafer cleaning, and PV fab steps

May 2011
PVTech
Fraunhofer ISE finds that Rasirc Steamer promotes 20.2% efficiency in back contact c-Si solar cells

February 2011
Readout
Water Vapor Delivery for Thin Film Vacuum Processes

June 15, 2011
BetaInsights
Fraunhofer Quantifies Steam Purity PV Benefits

July/August 2010
EverythingAboutEnvironment
Water Vapor Delivery for CIGSE and Other Thin Film Vacuum Processes

January/February 2010
Gases & Instrumentation Magazine
Alternative Method for Steam Generation for Thermal Oxidation of Silicon

May/June 2009
Global Solar Technology
Steamer vs. torch in PV manufacturing—a cost of ownership comparison

October 2008
Vacuum Technology & Coating
Water Vapor and Carbon Nanotubes

October 2008
Semiconductor International
Steam Generator

July 2008
Semiconductor International
SemiconWest 2008 Executive Outlook

April 2008
EuroAsiaSemiconductor
Full steam ahead

March 2008
Solid State Technology Magazine
Using ultrapure steam for water-contamination control

View all Articles and Coverage

 


Recent News

Article
Nafion-based Drying Apparatuses for Humidity Removal from Sample Gas Prior to GC/MS Analysis

September 15, 2014
RASIRC enables liquid Hydrogen Peroxide to be used in Vapor Phase Cleaning

July 23, 2013
RASIRC Announces Dry Peroxide™ Oxidant at ALD 2013

July 8, 2013
RASIRC to Bring Dry Peroxide™ to SemiconWest/InterSolar 2013

June 27, 2013
RASIRC Presents New Hydrogen Peroxide (H2O2) Vapor Source for Pre-Treatment/Cleaning in Atomic Layer Deposition

May 30, 2013
RASIRC Presents at Sematech Surface Preparation and Cleaning Conference

May 8, 2013
RASIRC Presents Poster on Novel Hydrogen Peroxide Vapor Delivery System

October 25, 2012
RASIRC Introduces Steamer 225 for Vacuum & Atmospheric Processes

Technical Paper
Water vapor delivery to vacuum process for photovoltaic
applications

Technical Poster
Steam Delivery into Vacuum

Article
A New Approach for Improved Uniformity of Thin Thermal Oxides Using Water Vapor: A Case Study

October 9, 2012
RASIRC Earns ISO 9001:2008 Certification

September 18, 2012
RASIRC Releases Results on Hydrogen Peroxide Vapor Delivery Systems for Surface Cleaning

Aug 28, 2012
MATHESON Acquires Majority Share of RASIRC

Application Note:
Wafer Bonding

March 29, 2012
RASIRC Steamer Turbo Winner of Golden Gas Award: Ultrapure steam and blended gas system wins in Specialty Gas Delivery Systems category

 
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