RASIRC Steamers Selected for Wet Thermal Oxidation of VCSELs: Systems recently installed in US and Asia
San Diego, Calif. – August 06, 2008 –RASIRC®, the steam purification company, announces it has sold multiple RASIRC Steamers for wet thermal oxidation of vertical cavity surface emitting lasers (VCSELs). The systems were purchased by major manufacturers in the United States and Asia for installation in each development lab. The steamers improve yield in the manufacture of the oxide aperture in VCSELs which is critical for laser performance. Yield is determined by the uniformity, growth rate, and contamination sensitivity of the film which are improved by using the RASIRC steamer because it eliminates the oxygen carrier gas.
The RASIRC Steamer combines a clean steam generator and steam purification assembly into a single system. The steam generator converts de-ionized (DI) water into high flow, ultra high purity (UHP) water vapor and the purifier assembly purifies clean steam to UHP steam by selective removal of dissolved gases, metals, and particulates to below levels of detection. The system provides an alternative to bubblers and vaporizers by eliminating the need for a nitrogen or argon carrier gas that can cause furnace uniformity challenges. Only the RASIRC Steamer technology can separate oxygen of the steam before entering the furnace.
“VCSEL yield is directly related to the precision of the oxide aperture structure. This hinges on the ability to deliver oxygen free steam and to tightly control the temperature and water vapor uniformity, so the choice of the water vapor delivery system is critical,” said RASIRC founder and president Jeffrey Spiegelman. “The RASIRC Steamer provides 100% of pure water vapor in a controlled fashion. This is an economical, safe, and very effective method for adding water for wet thermal oxidation.”
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