RASIRC Turns Thermal Mass Flow Measurement of Dilute Reactive Gas Species Inside Out
Company features new thermal mass gas sensor at ALD for Industry 2018
San Diego, Calif – March 19, 2018–RASIRC will present an new thermal mass gas sensor for independent measurement of precursor flow rate at the ALD for Industry 2018 conference held in Dresden, Germany March 21 and 22. The presentation will discuss the importance of precursor gas flow measurement independent of carrier gas flow and will provide experimental performance data with hydrogen peroxide gas. The company will also discuss its metal nitride and metal oxide precursor gases in the exhibits area.
RASIRC is a conference sponsor and will also participate in the exhibition. ALD for Industry is sponsored by the European Society for Thin Films (EFDS) and is a topical workshop focused on industrialization and commercialization of ALD for current and emerging markets.
“Process control is crucial for product yields and materials utilization,” said Jeffrey Spiegelman, RASIRC President and Founder. “New RASIRC monitoring technology solves a difficult problem for highly reactive gases, enabling better process stability and lower materials cost.”
RASIRC Brute Peroxide is a novel oxidant that improves passivation and nucleation density at film interfaces when compared to other oxidants. Surface functionalization is denser and initiation is faster using this anhydrous hydrogen peroxide gas compared with alternatives. This high reactivity allows for less chemistry use, and higher throughput due to shorter required purge times.
BRUTE Hydrazine enables low temperature ALD (sub-350°C) . Highly reactive, BRUTE Hydrazine creates uniform metal nitride deposition on 3D surfaces for barrier layers and atmospheric protection.
RASIRC’s Peroxidizer® provides high volumes of reactive H2O2/H2O mixtures for high throughput ALD. This reactive gas generator is ideal for roll-to-roll ALD coatings that require high speed deposition at reduced temperatures.
RASIRC products also include the RainMaker Humidification System (RHS) that generates water vapor for oxidation applications, and the Hydrogen Peroxide Steamer (HPS) for surface cleaning, preconditioning, wet thermal oxidation and residual carbon removal.