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RASIRC Products

RASIRC products generate and deliver gas to fabrication processes. Each unit is a dynamic gas plant in a box—converting low vapor-pressure liquid chemistries into safe and reliable gas flow for most processes. First to generate ultra-high purity (UHP) steam from de-ionized water, RASIRC technology can now also deliver hydrazine gas and hydrogen peroxide gas in controlled, repeatable concentrations.

Products include:

Peroxidizer®—High concentration hydrogen peroxide gas for next generation semiconductor fabrication. H2O2 gas is a strong oxidant ideally suited for ALD, annealing, cleaning and other processes involving new materials and 3D architectures.

BRUTE® Hydrazine—Ultra-dry hydrazine gas delivered with or without a carrier gas.

BRUTE® Peroxide—Ultra-dry hydrogen peroxide gas delivered with or without a carrier gas.

RainMaker® Humidification System—Controls the generation, purification and delivery of water vapor into a carrier gas stream.

Other Specialty Products—Including RainMaker, Water Vaporizers, and Wringer.

RASIRC Steamers—RASIRC Steamers have been obsoleted and will no longer be sold after Aug. 1, 2016.

 

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