The RASIRC Steam Purification Assembly (SPA) purifies clean steam to Ultra High Purity (UHP) steam by selective removal of dissolved gases, metals, and particulates to below levels of detection. The RASIRC SPA is designed to be placed downstream of the RASIRC Steamer to provide UHP steam to the process tool.
The main feature of RASIRC SPA is very thin wall non-porous hydrophilic tubing. This tubing allows the rapid transfer of molecular water vapor with very low pressure drop. Dissolved gas is prevented from transferring across the membrane. The RASIRC SPA is designed to work with the RASIRC Steamer and can also work with other clean steam sources, providing consistent process control.