The RASIRC Steamer 125
 The RASIRC Steamer 125 has a next generation design with a footprint of 12” length by 6” width for a steamer that is 65% smaller than RASIRC’s full-size steamer. At only 12” high the steamer is small enough to fit on 6” diffusion furnace shelves and the purifier is integrated within the cabinet rather than being externally mounted.
The RASIRC Steamer 125 can directly replace torches, bubblers, and direct water injection systems in 6”, 8”, and 12” furnaces as well as in other applications where flow rates of up to 12.5 slm of pure water vapor are needed. This unique product has the ability to control flow into vacuum or atmospheric pressure systems. It generates Ultra High Purity steam from de-ionized water without hydrogen or oxygen. Its high flow capacity, small size, and wide range of operating pressures benefit any process that is sensitive to impurities in water vapor or require an improvement in performance, cost, or safety over their present systems.
Users of the RASIRC Steamer demonstrated increased growth rate and uniformity by elimination of the oxygen carrier gas.
The growth rate of the oxide layer is directly related to the effective diffusion coefficient of the water molecules into the oxide layer and the equilibrium concentration in the immediate area. When a carrier gas is used to deliver water vapor, the carrier gas molecules generate a partial pressure. This partial pressure lowers the partial pressure of water vapor and slows the diffusion of water into the oxide film. The result is lower driving force and slower growth rate.
The RASIRC Steamer compensates for the partial pressure created by the carrier gas by delivery of ultrapure steam at a constant positive pressure. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, even the loading end of the furnace tube reaches maximum theoretical growth rate.
RASIRC Steamer uses a non-porous hydrophilic membrane that selectively allows water vapor to pass. Selectivity is significant with up to 1,000,000x relative to nitrogen molecules. In the vapor phase, the membrane only allows water. All other molecules are greatly restricted, so contaminants in water such as dissolved gases, ions, TOCs, particles, viruses, bacteria, pyrons, and metals can be removed n the steam phase.
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