The RASIRC Steamer 125
Miniature unit delivers up to 10 slm water vapor flow rate
The RASIRC Steamer 125 has a next generation design with a footprint of 12” length by 6” width for a steamer that is 65% smaller than RASIRC’s full-size Steamer. At only 12” high the Steamer is small enough to fit on 6” diffusion furnace shelves and the purifier is integrated within the cabinet rather than being externally mounted.
The RASIRC Steamer 125 can directly replace torches, bubblers, and direct water injection systems in 6”, 8”, and 12” furnaces as well as in other applications where flow rates of up to 10 slm of pure water vapor are needed.
This unique product has the ability to control flow into vacuum or atmospheric pressure systems. It generates Ultra High Purity steam from de-ionized water without hydrogen or oxygen. Its high flow capacity, small size, and wide range of operating pressures benefit any process that is sensitive to impurities in water vapor or requires an improvement in performance, cost, or safety over present systems.

In recent tests, the RASIRC Steamer delivered 18% improvement in growth rate over a bubbler, reducing process time by 2 whole days.

Customer tests show across the board 7% improvement in Steamer growth rate over the torch. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, RASIRC Steamer ensures that even the load end of the furnace tube reaches maximum theoretical growth rate.
The RASIRC Steamer 125 uses a non-porous hydrophilic membrane that selectively allows water vapor to pass. Selectivity is significant with up to 1,000,000x relative to nitrogen molecules. In the vapor phase, the membrane only allows water. All other molecules are greatly restricted, so contaminants in water such as dissolved gases, ions, TOCs, particles, viruses, bacteria, pyrons, and metals can be removed n the steam phase.
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