Japanese Datasheets
  home     careers     become a partner     portal     contact  
 
 
 

The RASIRC Steamer 125

Miniature unit delivers up to 10 slm water vapor flow rate

The RASIRC Steamer 125 has a next generation design with a footprint of 12” length by 6” width for a steamer that is 65% smaller than RASIRC’s full-size Steamer. At only 12” high the Steamer is small enough to fit on 6” diffusion furnace shelves and the purifier is integrated within the cabinet rather than being externally mounted.

The RASIRC Steamer 125 can directly replace torches, bubblers, and direct water injection systems in 6”, 8”, and 12” furnaces as well as in other applications where flow rates of up to 10 slm of pure water vapor are needed.

This unique product has the ability to control flow into vacuum or atmospheric pressure systems. It generates Ultra High Purity steam from de-ionized water without hydrogen or oxygen. Its high flow capacity, small size, and wide range of operating pressures benefit any process that is sensitive to impurities in water vapor or requires an improvement in performance, cost, or safety over present systems.

Growth Rate Comparison shows 18% improvement over Bubbler

In recent tests, the RASIRC Steamer delivered 18% improvement in growth rate over a bubbler, reducing process time by 2 whole days.

Growth Rate Comparison show 7% improvement over Torch

Customer tests show across the board 7% improvement in Steamer growth rate over the torch. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, RASIRC Steamer ensures that even the load end of the furnace tube reaches maximum theoretical growth rate.

The RASIRC Steamer 125 uses a non-porous hydrophilic membrane that selectively allows water vapor to pass. Selectivity is significant with up to 1,000,000x relative to nitrogen molecules. In the vapor phase, the membrane only allows water. All other molecules are greatly restricted, so contaminants in water such as dissolved gases, ions, TOCs, particles, viruses, bacteria, pyrons, and metals can be removed n the steam phase.

 

Additional Information

Steamer 125 Datasheet

UHP Steam

Torch Comparison

Bubbler Comparison

Case Study

White Paper—Growth Rate

White Paper—Performance

White Paper—Method and Device for Steam Purification and Delivery

White Paper—Urea and Ammonia Removal

White PaperControl and Optimization of Therma Oxidation Processes for Industrial Solar Cell Fabrication

White PaperWet Thermal Oxide Film Performance Exceeds Dry Oxide

White PaperThermal Oxidation as a Key Technology for High Efficiency Screen Printed Industrial Silicon Solar Cells

White PaperSilicon Dioxide Layer Key to High Efficiency Crystalline Solar Cells

White PaperSolar Cell Fabrication

White PaperImproved Uniformity through New Steam Delivery Method

Information Request

Related Material

Steamer '02 Datasheet

Steamer 501 Datasheet

Steamer Accessories

RASIRC SPA Datasheet

Application Sheet - Solar

 

 

 
RASIRC Home