The RASIRC Steamer 501
Ultra pure water vapor flow rates up to 50 slm
 The RASIRC Steamer 501 supports high flow rates of ultra pure water vapor. All wetted components in the liquid path are quartz or Teflon® and the purified steam path components are quartz and Teflon® fittings and valves.
The RASIRC Steamer is proven to increase oxide growth rate, chamber uniformity, film quality, and/or reduce operating cost when compared against all other steam technologies.
Tests show reduction of 67 different metals to below detectable limits. Some contaminants have been verified to less than 0.0005 parts per billion. Urea, Nitrogen and CO2 can also be eliminated. Because the RASIRC Steamer works with water vapor at low pressures, stainless steel delivery systems can be replaced with quartz and fluoropolymer piping systems.
The RASIRC Steamer 501 has a built-in heater that generates steam from DI water. A non-porous hydrophilic membrane within the RASIRC SPA purifies the steam selectively allows water vapor to pass. Selectivity is significant with up to 1,000,000x relative to nitrogen molecules. In the vapor phase, the membrane selectively passes water molecules. All other molecules are greatly restricted, so contaminants in water such as dissolved gases, ions, TOCs, urea, particles, viruses, bacteria, pyrons, and metals can be removed in the steam phase.
Flow rate is controlled by closely monitoring and automatically adjusting the upstream and downstream pressure. The heater energy can be adjusted to increase or decrease the flow rate. Water levels are constantly monitored and adjusted to ensure continuous steam flow.
In recent tests, the RASIRC Steamer delivered 18% improvement in growth rate over a bubbler, reducing process time by 2 whole days.
Customer tests show across the board 7% improvement in Steamer growth rate over the torch. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, RASIRC Steamer ensures that even the load end of the furnace tube reaches maximum theoretical growth rate.
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