The RASIRC Steamer Turbo
Integrated unit blends high flow rate steam with compressed gas
 The RASIRC® Steamer Turbo is the first RASIRC Steamer with integrated gas blending. This steamer is ideal for wafer cleaning and thinner thermal oxidation applications that require high flow rates of steam combined with compressed gas. The result is better uniformity, higher gas velocities, and greater momentum for particle movement after condensation.
The Steamer Turbo solves the common problem of condensation when blending steam with other gases. Before adding steam, blended gases are heated above the steam dewpoint, which is typically at least 105°C but may be hotter in many applications that need to impart more energy to the wafer upon contact.
RASIRC Steamers are proven to increase oxide growth rate, chamber uniformity, film quality, and/or reduce operating cost when compared against all other steam technologies. Tests show reduction of 67 different metals to below detectable limits. Some contaminants have been verified to less than 0.0005 parts per billion.
The Steamer Turbo combines a clean steam generator, steam flow controller, steam purifier, and a heated gas blending controller into a single integrated package. All wetted surfaces in the liquid and purified steam path are quartz or Teflon®.
The integrated compressed gas control system within the Steamer Turbo includes a mass flow controller, regulator, filter and in-line gas heater, and can deliver up to 100 slm of compressed gas at 120°C. The close coupling of the gas heater to the purified steam outlet ensures cleanliness and the virtual elimination of condensation. The dry gas wetted surfaces are all 316L stainless steel.
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