Water vapor flow rates up to 50 slm from integrated unit that replaces torches, vaporizers and bubblers
RASIRC Steamers generate ultra pure steam and deliver this steam to process at a consistent flow rate of up to 50 slm. These Steamers are proven to increase oxide growth rate, chamber uniformity, film quality, and/or reduce operating cost when compared against all other steam technologies.
In recent tests, the RASIRC Steamer delivered 18% improvement in growth rate over a bubbler, reducing process time by 2 whole days.
Customer tests show across the board 7% improvement in Steamer growth rate over the torch. By eliminating the carrier gas and blanketing the entire furnace tube in pure water vapor, RASIRC Steamer ensures that even the load end of the furnace tube reaches maximum theoretical growth rate.
Tests also show reduction of 67 different metals to below detectable limits. Some contaminants have been verified to less than 0.0005 parts per billion. Urea, Nitrogen and CO2 can be eliminated. Because the RASIRC Steamer works with water vapor at low pressures, stainless steel delivery systems can be replaced with quartz and fluoropolymer piping systems, eliminating potential metallic contaminants.
RASIRC Steamers combine a clean steam generator and steam purification assembly into a single system. All wetted components in the liquid path are quartz or Teflon®. The purified steam path components are quartz and Teflon® fittings and valves.
Water Vapor Flow Rate Options
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