Steam Purification Process
This animation illustrates steam purification and delivery to the process tool. Steam is generated in boiler from de-ionized water. Steam then enters the purifier. Water permeates across the membrane. Ultra High Purity steam flows to the process tool. Contaminants and reject steam go to waste.
Water Passing through Membrane
This animation illustrates how steam permeates the membrane within the purifier assembly. The membrane is highly selective for water molecules, effectively purifying the original de-ionized water.