RASIRC Home
 

Animations

Steam Purification Process

This animation illustrates steam purification and delivery to the process tool. Steam is generated in boiler from de-ionized water. Steam then enters the purifier. Water permeates across the membrane. Ultra High Purity steam flows to the process tool. Contaminants and reject steam go to waste.

Steam Purification Process Animation

Water Passing through Membrane

This animation illustrates how steam permeates the membrane within the purifier assembly. The membrane is highly selective for water molecules, effectively purifying the original de-ionized water.

Water Passing through Membrane animation

 


Recent News

Article
Nafion-based Drying Apparatuses for Humidity Removal from Sample Gas Prior to GC/MS Analysis

October 21, 2014
RASIRC Technology Successfully Used to Clean and Prepare Germanium Surfaces: High Purity Hydrogen Peroxide Vapor Delivered In-Situ

September 15, 2014
RASIRC enables liquid Hydrogen Peroxide to be used in Vapor Phase Cleaning

July 23, 2013
RASIRC Announces Dry Peroxide™ Oxidant at ALD 2013

July 8, 2013
RASIRC to Bring Dry Peroxide™ to SemiconWest/InterSolar 2013

June 27, 2013
RASIRC Presents New Hydrogen Peroxide (H2O2) Vapor Source for Pre-Treatment/Cleaning in Atomic Layer Deposition

May 30, 2013
RASIRC Presents at Sematech Surface Preparation and Cleaning Conference

May 8, 2013
RASIRC Presents Poster on Novel Hydrogen Peroxide Vapor Delivery System

October 25, 2012
RASIRC Introduces Steamer 225 for Vacuum & Atmospheric Processes

Technical Paper
Water vapor delivery to vacuum process for photovoltaic
applications

Technical Poster
Steam Delivery into Vacuum

Article
A New Approach for Improved Uniformity of Thin Thermal Oxides Using Water Vapor: A Case Study

October 9, 2012
RASIRC Earns ISO 9001:2008 Certification

September 18, 2012
RASIRC Releases Results on Hydrogen Peroxide Vapor Delivery Systems for Surface Cleaning

Aug 28, 2012
MATHESON Acquires Majority Share of RASIRC

Application Note:
Wafer Bonding

March 29, 2012
RASIRC Steamer Turbo Winner of Golden Gas Award: Ultrapure steam and blended gas system wins in Specialty Gas Delivery Systems category

 
RASIRC Home