Resources

White Papers

Comparison of Water Vapor to Ozone for Growth of ALD Films
by Jeffrey Spiegelman, Jonas Sundqvist
Presented at PVSEC, Hannover, Germany
Sept 5-8, 2011

Properties of Purified Direct Steam Grown Silicon Thermal Oxides
S. Mack, et al., Sol. Energy Mater. Sol. Cells (2011), doi:10.1016/j.solmat.2011.03.002
September 2011

Pilot-Line Processing of Highly-Efficient MWT Silicon Solar Cells
by F. Clement, B. Thaidigsmann, R. Hoenig, T. Fellmeth, A. Spribille, E. Lohmueller, A. Krieg, M. Glatthaar, H. Wirth, D. Biro, R. Preu, M. Menkoe, K. Meyer, D. Lahmer, H. Krokoszinski, M. Neidert, A. Henning, C. Mohr and W. Zhang
Progress in cell technology and challenges to reach efficiencies toward 20% are discussed.
Presented at PVSEC
Sept 5-8, 2010

Inline Single Side Oxide Etch for Read Side Passivated Solar Cells
by Bernd-Uwe Sander, Denise Queisser, Steffen Queisser, Franck Delahaye, Agnes Merkle, Till Brendemuhl, Thorsten Dullweber
Describes a method to strip one side of a thermal oxide.
Presented at PVSEC
Sept 5-8, 2010

Sophistication of Doping Profile Manipulation: Emitter Performance Improvement Without Additional Process Step
by Yuji Komatsu, Arno F. Stassen, Peter Venema, Ard H.G. Vlooswijk, Christine Meyer, and Michiel Koorn
Presented at PVSEC, Valencia, Spain
Sept 6-9, 2010

Water Vapor Delivery for CIGSe and Other Thin Film Vacuum Processes
by Jeffrey Spiegelman and Said Boumsellek, Ph D
Presented at 35th IEEE PVSC Honolulu, HI
June 20-25, 2010

Purified Steam for Industrial Thermal Oxidation Processes
by Sebastian Mack, Daniel Biro, Andreas Wolf, Benjamin Thaidigsmann, Alexandra Walczak, Jeffrey Speigelman, Ralf Preu (RASIRC and Fraunhofer Institue for Solar Engergy Systems)
Presented at 35th IEEE PVSC Honolulu, HI
June 20-25, 2010

Passivation Quality of Wet Oxides Grown from Purified Steam
by J. Benick, K. Zimmermann, M. Hermle and S. W. Glunz
(Fraunhofer Institute for Solar Energy Systems (ISE)) and J. Spiegelman (RASIRC)
Presented at 24th European PV Solar Energy Conference and Exhibition
September 2009

Control and Optimization of Therma Oxidation Processes for Industrial Solar Cell Fabrication
by Sebastian Mack, Anke Lemke, Andreas Wolf, Benedikt Holzinger, Martin Zimmer, Daniel Biro, and Ralf Preu (Fraunhofer Institute for Solar Energy Systems)
Presented at 34th IEEE PVSC Philadelphia, PA
June 7-12, 2009

Thermal Oxidation as a Key Technology for High Efficiency Screen Printed Industrial Silicon Solar Cells
by Daniel Biro, Sebastian Mack, Andreas Wolf, Anke Lemke, Udo Belledin, Denis Erath, Benedikt Holzinger, Edgar Allan Wotke, Marc Hofmann, Luca Gautero, Jochen Rentsch, Ralf Preu (Fraunhofer Institute for Solar Energy Systems (ISE))
Presented at the 34th IEEE PVSC, Philadelphia
June 2009

Silicon Dioxide Layer Key to High Efficiency Crystalline Solar Cells
December 2008

Wet Thermal Oxide Film Performance Exceeds Dry Oxide
September 2008

Process Variables Affecting Silicon Oxide Films Related to Wet Thermal Oxidation
May 2008

RainMaker Humidification System for Precise Delivery of Water Vapor into Atmospheric and Vacuum Application
February 2008

Improved Uniformity through New Steam Delivery Method
January 2008

Uses of Water Vapor for Solar Cell Fabrication
December 2007

Water Vapor and Carbon Nanotubes
June 2007

Using Water Vapor to Improve Photovoltaic Performance and Reduce Costs
May 2007

Improved Oxide Growth Rate and Uniformity through New Steam Delivery Method
January 2007

Wet Thermal Oxidation of VCSELs using the RASIRC Steamer Purification System
February 2007

Urea and Ammonia Removal from De-Ionized Water via Steam Purification
Presented at SPWCC, February 2007

Method and Device for Purification and Delivery of Steam
Presented at SPWCC, February 2006