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Tech Notes

Improved Oxide Growth Rate and Uniformity through New Steam Delivery Method

Non-Uniformity in Wet Thermal Oxidation

 

 

Recent News

February 10, 2010
Matheson Tri-Gas and RASIRC Sign Exclusive Distribution Deal for RASIRC Products

Article
Alternative Method for Steam Generation for Thermal Oxidation of Silicon
—Gases & Instrumentation Magazine

January 20, 2010
RASIRC Presents Poster on Thermal Oxidation of Silicon at SPIE:
Steamer replaces pyrolytic torches to improve growth rate and eliminate hydrogen

January 12, 2010
RASIRC Introduces the Steamer ‘02 for Ultrapure Process Steam: New Generation of Steamer for Precision Flow Control and Tool-to-Tool Repeatability

January 6, 2010
RASIRC Granted Trademark for RainMaker Product Line: Unique humidifier assembly and systems now protected

Nov 23, 2009
RASIRC Granted Patent on Vaporizer for Delivery of Water Vapor and Other Low Vapor Pressure Gases

Technical Paper
Passivation Quality of Wet Oxides Grown from Purified Steam

Article
Steamer vs. torch in PV manufacturing—a cost of ownership comparison

Article
Water Vapor and Carbon Nanotubes
—Vacuum Technology and Coating

Awards

Connect 2007 Finalist

MicroNano 2007

RASIRC was selected as a winner to appear in the 2006 Semicon West Technology Innovation Showcase

RASIRC won the Attendees' Choice Award at Semicon West 2006

RASIRC won the 2006  Gassy Award

RASIRC is profiled in this video, aired on Fox Connect

 
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