White Papers / Technical Papers

Hydrogen Peroxide Gas Delivery for Atomic Layer Deposition, Annealing, and Surface Cleaning in Semiconductor Processing
Jeffrey Spiegelman, Russ Holmes and Zohreh Shamsi
June 2016

Particle Generation by Incomplete Vaporization of Condensable Fluids and Particle Prevention by Membrane Pervaporation
Jeffrey Spiegelman, Daniel Alvarez, Russ Holmes
June 2016

Anhydrous Hydrogen Peroxide Gas Delivery for Atomic Layer Deposition
D. Alvarez, Jr., J. Spiegelman
February 2016

Steam Delivery Into Vacuum
J. Spiegelman, B. Arya
April 2012 (presented at SiliconPV 2012)

Water vapor delivery to vacuum process for photovoltaic applications
J. Spiegelman, B. Arya
April 2012

A New Approach for Improved Uniformity of Thin Thermal Oxides Using Water Vapor
by Richard Mee, Jeffrey Spiegelman
March 2012

Comparison of Water Vapor to Ozone for Growth of ALD Films
by Jeffrey Spiegelman, Jonas Sundqvist
Presented at PVSEC, Hannover, Germany
Sept 5-8, 2011

Properties of Purified Direct Steam Grown Silicon Thermal Oxides
S. Mack, et al., Sol. Energy Mater. Sol. Cells (2011), doi:10.1016/j.solmat.2011.03.002
September 2011

Pilot-Line Processing of Highly-Efficient MWT Silicon Solar Cells
by F. Clement, B. Thaidigsmann, R. Hoenig, T. Fellmeth, A. Spribille, E. Lohmueller, A. Krieg, M. Glatthaar, H. Wirth, D. Biro, R. Preu, M. Menkoe, K. Meyer, D. Lahmer, H. Krokoszinski, M. Neidert, A. Henning, C. Mohr and W. Zhang
Progress in cell technology and challenges to reach efficiencies toward 20% are discussed.
Presented at PVSEC
Sept 5-8, 2010

Inline Single Side Oxide Etch for Read Side Passivated Solar Cells
by Bernd-Uwe Sander, Denise Queisser, Steffen Queisser, Franck Delahaye, Agnes Merkle, Till Brendemuhl, Thorsten Dullweber
Describes a method to strip one side of a thermal oxide.
Presented at PVSEC
Sept 5-8, 2010

Sophistication of Doping Profile Manipulation: Emitter Performance Improvement Without Additional Process Step
by Yuji Komatsu, Arno F. Stassen, Peter Venema, Ard H.G. Vlooswijk, Christine Meyer, and Michiel Koorn
Presented at PVSEC, Valencia, Spain
Sept 6-9, 2010

Water Vapor Delivery for CIGSe and Other Thin Film Vacuum Processes
by Jeffrey Spiegelman and Said Boumsellek, Ph D
Presented at 35th IEEE PVSC Honolulu, HI
June 20-25, 2010

Purified Steam for Industrial Thermal Oxidation Processes
by Sebastian Mack, Daniel Biro, Andreas Wolf, Benjamin Thaidigsmann, Alexandra Walczak, Jeffrey Speigelman, Ralf Preu (RASIRC and Fraunhofer Institue for Solar Engergy Systems)
Presented at 35th IEEE PVSC Honolulu, HI
June 20-25, 2010

Passivation Quality of Wet Oxides Grown from Purified Steam
by J. Benick, K. Zimmermann, M. Hermle and S. W. Glunz
(Fraunhofer Institute for Solar Energy Systems (ISE)) and J. Spiegelman (RASIRC)
Presented at 24th European PV Solar Energy Conference and Exhibition
September 2009

Control and Optimization of Therma Oxidation Processes for Industrial Solar Cell Fabrication
by Sebastian Mack, Anke Lemke, Andreas Wolf, Benedikt Holzinger, Martin Zimmer, Daniel Biro, and Ralf Preu (Fraunhofer Institute for Solar Energy Systems)
Presented at 34th IEEE PVSC Philadelphia, PA
June 7-12, 2009

Thermal Oxidation as a Key Technology for High Efficiency Screen Printed Industrial Silicon Solar Cells
by Daniel Biro, Sebastian Mack, Andreas Wolf, Anke Lemke, Udo Belledin, Denis Erath, Benedikt Holzinger, Edgar Allan Wotke, Marc Hofmann, Luca Gautero, Jochen Rentsch, Ralf Preu (Fraunhofer Institute for Solar Energy Systems (ISE))
Presented at the 34th IEEE PVSC, Philadelphia
June 2009

Silicon Dioxide Layer Key to High Efficiency Crystalline Solar Cells
December 2008

Wet Thermal Oxide Film Performance Exceeds Dry Oxide
September 2008

Process Variables Affecting Silicon Oxide Films Related to Wet Thermal Oxidation
May 2008

RainMaker Humidification System for Precise Delivery of Water Vapor into Atmospheric and Vacuum Application
February 2008

Improved Uniformity through New Steam Delivery Method
January 2008

Uses of Water Vapor for Solar Cell Fabrication
December 2007

Water Vapor and Carbon Nanotubes
June 2007

Improved Oxide Growth Rate and Uniformity through New Steam Delivery Method
January 2007

Wet Thermal Oxidation of VCSELs using the RASIRC Steamer Purification System
February 2007

Urea and Ammonia Removal from De-Ionized Water via Steam Purification
Presented at SPWCC, February 2007

Method and Device for Purification and Delivery of Steam
Presented at SPWCC, February 2006


Recent News

March 19, 2018
RASIRC Turns Thermal Mass Flow Measurement of Dilute Reactive Gas Species Inside Out

February 26, 2018
RASIRC Discusses Role of Hydrogen Peroxide Gas in Advanced Lithography

July 15, 2017
RASIRC Releases Next Generation RainMaker Humidification System for Fine Water Vapor Delivery

July 13, 2017
RASIRC Presents TiN ALD Grown with BRUTE® Hydrazine at ALD Conference 2017

June 6, 2017
RASIRC to Exhibit and Present at Joint EUROCVD and Baltic ALD Conference

May 22, 2017
RASIRC Presents Ultra-High Purity Hydrazine Delivery at ECS Spring 2017

May 10, 2017
RASIRC Presents Hydrazine for Low Temperature ALD at ASMC 2017

April 19, 2017
RASIRC Presents Novel Reactive Chemistries for in-situ Surface Functionalization

March 23, 2017
RASIRC Presents Low Temperature ALD of Titanium Nitride at MAM 2017

January 16, 2017
RASIRC Presents New Chemistries for Low Temperature Oxide and Nitride Films

September 26, 20016
RASIRC® BRUTE® peroxide and hydrazine technology for leading edge memory and high performance logic

September 26, 2016
RASIRC Presents on Low Temperature Nitride Passivation at PRiME/ECS

September 6, 2016
RASIRC Presents on Surface Passivation of New Channel Materials at UCPSS: Atomic Layer Passivation enabled Hydrogen Peroxide Gas First Step

August 31, 2016
RASIRC Renews Funding for Atomic Layer Deposition Research at University of California, San Diego (UCSD): Gift donation supports one student researcher for one year

June 23, 2016
RASIRC Releases Technical Report on Hydrogen Peroxide Gas Delivery for ALD, Annealing and Cleaning in Semiconductor Processes

June 7, 2016
RASIRC Study Finds 500 Fold Particle Reduction Using RASIRC RHS versus Flash Vaporizer

Recent Articles

Jan 4, 2017
Jonas Sundqvist
Bald Engineering Blog: RASIRC® to present New ALD chemistries for low temperature oxide and nitride films at ALD4Industry

December 14, 2016
Bald Engineering Blog: Grow Low Temperature Nitrides by Atomic Layer Deposition Without Plasma

June 22, 2016
Bald Engineering Blog: Hydrogen Peroxide Gas Delivery for ALD, Annealing, and Surface Cleaning in Semiconductor Processing

April 7, 2016
Solid State Technology LinkedIn
Rocket Fuel May Propel Moore's Law

Cheating Raoult’s Law to Enable Delivery of Hydrogen Peroxide as a Stable Vapor