Technical Videos

RASIRC

Technical Videos

Research results and technical details

Comparative Study of Titanium Nitride ALD using High Purity Hydrazine vs Ammonia

Daniel Alvarez, PhD

HYDRAZINE
OCTOBER 2020

Low Temperature Crystalline AlN ALD with Hydrazine

Professor Andrew C. Kummel (UCSD)

HYDRAZINE
JUNE 2020

RASIRC BRUTE Hydrazine versus Ammonia for III-V Nitride Deposition

Daniel Alvarez, PhD

HYDRAZINE
JUNE 2020

Oxidant Comparison

Daniel Alvarez, PhD

HYDRAZINE
JUNE 2020

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RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.

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