Ultra-Dry Hydrazine Gas for Low Temperature Nitrides
Brute® Hydrazine Gas: Reducing Agent and Nitride Source
Low Temperature, High Aspect Ratio
Hydrazine is an excellent low temperature thermal ALD nitride source. Next generation devices have low thermal budgets and high aspect ratio structures that create new challenges for conformal III-V nitride films. Old solutions cannot meet these new challenges. Nitrogen from ammonia does not yield quality films below 400°C. Plasma delivery does not uniformly coat internal side walls of high aspect ratio structures and causes surface damage.
Advantages of Hydrazine Gas
- Highly reactive, enabling thermal ALD at much less than 400°C
- No line of sight required, providing uniform films on high aspect ratio structures
- No oxygen or carbon, eliminating contamination
- Fewer device defects
- Better electrical performance

Get Independent Research Results
Latest News
RASIRC Study Shows Nitride Film Growth at 225°C with Hydrazine
RASIRC research shows that aluminum nitride can be grown thermally at 225°C without detrimental oxygen incorporation. The resulting paper is one of the first published demonstrating this ability, which will be useful for memory and logic devices as well as future semiconductor manufacturing.
PUBLISHED March 15, 2022
China Grants Patent to RASIRC for BRUTE® Hydrazine
China has granted a patent related to the delivery of anhydrous hydrazine gas to process. This patent is part of family of patents around hydrazine, water, and hydrogen peroxide to enable safer and low temperature processing of next generation devices for microelectronic applications.
PUBLISHED March 3, 2022
Record Low Resistivity Titanium Nitride Film Fabricated by Thermal ALD – Ultra-dry hydrazine enables growth at low temperature
Authored by researchers from UCSD, Samsung, and RASIRC
PUBLISHED JANUARY 18, 2022
The Emergence of Hydrazine (N2H4) in Semiconductor Applications
Daniel Alvarez and Jeffrey Spiegelman
HYDRAZINE 2022

The Emergence of Hydrazine (N2H4) in Semiconductor Applications
Daniel Alvarez and Jeffrey Spiegelman
HYDRAZINE 2022

RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.
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