RASIRC Peroxidizer® 8.1
Concentrated H202 Gas Delivery
High Concentration Hydrogen Peroxide Gas Delivery System
The RASIRC Peroxidizer provides a safe, reliable way to deliver high-concentration hydrogen peroxide gas into ALD, annealing, dry surface preparation and cleaning processes.
. Safely concentrates H202 from semiconductor grade 30% weight H202
. Flows H202 gas to process at up to 50,000 ppm, depending on flow rate
. Delivers high purity H202 without entrained droplets or decomposition
LATEST NEWS
RASIRC Granted Patent for Controlled Delivery of Hydrogen Peroxide Gas
A novel method for generation of H2O2 gas enables more accurate and repeatable delivery of hydrogen peroxide gas into a wide range of flow rates, operating pressures, and temperatures.
PUBLISHED FEBRUARY 23, 2022
3 MINUTE READ
RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.
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