Peroxidizer

High Concentration

The Peroxidizer delivers 10x concentration of hydrogen peroxide gas at a given temperature and delivers droplet-free gas at temperatures as low as 80 °C. The Peroxidizer delivers up to 5% hydrogen peroxide gas by volume from 30% hydrogen peroxide liquid solution.

Bigger Precursor Range

New materials and architectures are more temperature sensitive than their predecessors, such as SiGe and new memory alloys, forcing lower thermal budgets. Hydrogen peroxide gas from the Peroxidizer has higher reactivity at lower temperature, increasing the range of precursors available to process engineers.

Strong Oxidant

Hydrogen peroxide gas readily converts to highly reactive OH radicals , creating a high density ALD nucleation and faster reactions with precursors. Oxygen plasma can penetrate below the interface layer, damaging the bottom electrode and surface structures. Plasma cannot reach the bottom of deep structures as it requires line-of-sight, so coatings may be non-uniform, favoring the top of the structure.

Low Temperature 

High concentration hydrogen peroxide gas delivered by the Peroxidizer creates a dense hydroxylated layer at a lower operating temperature than other oxidants. To achieve the same level of reactivity, water requires higher process temperatures that are not compatible with new materials.