Peroxidizer

RASIRC Peroxidizer® 8.1

Concentrated H202 Gas Delivery

High Concentration Hydrogen Peroxide Gas Delivery System

The RASIRC Peroxidizer provides a safe, reliable way to deliver high-concentration hydrogen peroxide gas into ALD, annealing, dry surface preparation and cleaning processes.

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. Safely concentrates H202 from semiconductor grade 30% weight H202

. Flows H202 gas to process at up to 50,000 ppm, depending on flow rate

. Delivers high purity H202 without entrained droplets or decomposition

LATEST NEWS

RASIRC Granted Patent for Controlled Delivery of Hydrogen Peroxide Gas

A novel method for generation of H2O2 gas enables more accurate and repeatable delivery of hydrogen peroxide gas into a wide range of flow rates, operating pressures, and temperatures.

PUBLISHED FEBRUARY 23, 2022
3 MINUTE READ

RASIRC products generate and deliver water vapor, hydrogen peroxide and hydrazine gas in controlled, repeatable concentrations to critical processes.

Contact

info@rasirc.com
858.259.1220

7815 Silverton Avenue
San Diego, CA 92126
USA

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